DSC_6567

Location: Egan 317

Status: Online

Hitachi S-4800 is a high-resolution scanning electron microscope (SEM) with cold field emission gun. The maximum resolution can reach ~1nm. It is equipped with energy-dispersive X-ray spectroscopy (EDS) system that enables sample element analysis. It also has a Nabity nanolithography e-beam pattern generation system.

Instrument Specifications

Electron Source Cold Field Emission Gun
Accelerating Voltage 500V to 30kV in 100V steps
Resolution 1.0 nm Accelerating Voltage 15kV, Working Distance 4 mm
2.0 nm Accelerating Voltage 1kV, Working Distance 1.5 mm
Magnification High Mag Mode 100x to 800,000x
Low Mag Mode 30x to 2,000x
Specimen Stage X Traverse 0 to 110 mm
Y Traverse 0 to 110 mm
Z Traverse 1.5 to 40 mm
Tilt -5° to +70°
Rotation 360°
Specimen Size Max. 150 mm (6")
Image Mode Secondary Electron Imaging
Back Scattering Electron Imaging
Accessories Energy-dispersive X-ray Spectroscopy System
Nabity Nanolithography e-beam Pattern Generation System