Matteo receives the DARPA Young Faculty Award

July 30th 2012, Matteo receives the DARPA Young Faculty Award in Arlington, VA.

From left to right: Dr. Thomas Lee Director of the DARPA Microsystems Technology Office (MTO), Dr. Matteo Rinaldi, Dr. William Casebeer DARPA YFA Program Manager.

Go to the press release

Sensor Array

AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout

Read the papers for more details:

M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, “Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors”, Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pg. 2666-2670. Download Here

M. Rinaldi, C. Zuniga and G. Piazza, ss-DNA Functionalized Array of AlN Contour-Mode NEMS Resonant Sensors with Single CMOS Multiplexed Oscillator for sub-ppb Detection of Volatile Organic Chemicals, Proceedings of the 24th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, 23-27 January 2011, pg. 976-979.

Outstanding Paper Award at Transducers 2015

 Zhenyun holding the award certificate with Prof. Rinaldi at Dena’ina Convention Center, Anchorage, AK. June 25, 2015

The paper Z. Qian, Y. Hui, F. Liu, S. Kar and M. Rinaldi, 1.27 GHz Graphene-Aluminum Nitride Nano Plate Resonant Infrared Detector has been honored as a winner of the Outstanding Paper Award at the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) on June 21-25, 2015 in Anchorage, Alaska, USA.


10GHz Resonator

10 GHz AlN Nano Plate Resonator
Read the paper for details:

M. Rinaldi, C. Zuniga, and G. Piazza, “5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators”, Proceedings of the 22nd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, 24-28 January 2009, pg. 916-919. Download Here


AlN Nano Plate Resonator with integrated Carbon Nanotube Forest
Read the papers for details:

M. Rinaldi, C. Zuniga, N. Sinha, M. Taheri, S. M. Khamis, A. T. Johnson, and G. Piazza, Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators, Proceedings of the IEEE International Frequency Control Symposium 2008, Honolulu, Hawaii, USA, 18-21 May 2008, pg, 443-448.

Graphene electrode for piezoelectric NEMS resonators

Schematic illustration in layers view of a contour-extensional mode AlN NEMS resonator, where the top electrode is fabricated using a single-atomic-layer graphene sheet.
Graphene Massless Electrode (more…)

Best Student Paper Award at IEEE IFCS 2015

The paper G. Hummel and M. Rinaldi, Switchable 2-Port Aluminum Nitride MEMS Resonator Using Monolithically Integrated 3.6THz Cut-Off Frequency Phase-Change Switches has been selected as Best Student Paper at the 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS 2015) on April 12-16, 2015 in Denver, Colorado, USA.


Our first group photo

This is the photo we took for ECE 2012 annual report.

From left to right: Prof. Matteo Rinaldi, Shahrokh Saeedi, Dr. Yu Hui, Raúl Vyas, Zhenyun Qian.

(Shahrokh left our group at the end of summer 2012, Raúl Vyas graduated in May 2014, Dr. Yu Hui graduated in May 2015)

See details of our current group members

Feb 15


Dr. Rinaldi seeks outstanding candidates to fill one Post-Doctoral position in the Department of Electrical and Computer Engineering at Northeastern University. The candidates will be working on research projects related to the design and implementation of a new class of Metamaterials enabled Nano Electro Mechanical System (NEMS) devices for sensing applications. For more information, please click here!

Permanent link to this article:

Feb 15

Transducers 2013 Papers Accepted for Presentation

The paper Z. Qian, Y. Hui, F. Liu, S. Kar and M. Rinaldi 245 MHz Graphene-Aluminum Nitride Nano Plate Resonator and the paper Y. Hui and M. Rinaldi High Performance NEMS Resonant Infrared Detector Based on an Aluminum Nitride Nano Plate Resonator, both have been accepted for presentation at the Transducers 2013 & Eurosensors XXVII, Barcelona, Spain, June 16-20, 2013.

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Jan 28

IEEE MEMS 2013 Outstanding Paper Finalist

The paper Y. Hui, T. Nan, N. X. Sun and M. Rinaldi, MEMS Resonant Magnetic Field Sensor Based on an AlN/FeGaB Bilayer Nano-Plate Resonator, was nominated Outstanding Poster Paper at the IEEE MEMS 2013 conference, Taipei, Taiwan, 20-24 January 2013. Congratulations!

Permanent link to this article:

Nov 05

We are on ECE annual report

The ECE annual report of 2012 has been published: Download ECE annual report

Our group is introduced by the article entitled “DARPA Award: New infrared sensor technology” at page 3.
Check it out!

Permanent link to this article:

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