IEEE MEMS 2013 Outstanding Paper Finalist

The paper Y. Hui, T. Nan, N. X. Sun and M. Rinaldi, MEMS Resonant Magnetic Field Sensor Based on an AlN/FeGaB Bilayer Nano-Plate Resonator, was nominated Outstanding Poster Paper at the IEEE MEMS 2013 conference, Taipei, Taiwan, 20-24 January 2013. Congratulations!

10GHz Resonator

10 GHz AlN Nano Plate Resonator

Matteo receives the DARPA Young Faculty Award

July 30th 2012, Matteo receives the DARPA Young Faculty Award in Arlington, VA.

From left to right: Dr. Thomas Lee Director of the DARPA Microsystems Technology Office (MTO), Dr. Matteo Rinaldi, Dr. William Casebeer DARPA YFA Program Manager.

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Hilton Head 2012 Workshop

Prof. Rinaldi attended Hilton Head 2012 Workshop to present his paper 970 MHz Ovenized Oscillator Based on an AlN MEMS Resonator with Monolithically Integrated Suspended Nano Hot Plate.

This is a picture of him and his colleague and student at the conference. From left to right: Prof. Nick McGruer (NEU), Marco Giovannini (UPenn), Dr. Chiara Zuniga (Qualcomm MEMS Technologies), Prof. Matteo Rinaldi (NEU), Yu Hui (NEU).

Sensor Array

AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout


AlN Nano Plate Resonator with integrated Carbon Nanotube Forest

Our first group photo

This is the photo we took for ECE annual report.

From left to right: Prof. Matteo Rinaldi, Shahrokh Saeedi, Yu Hui, Raúl Vyas, Zhenyun Qian.

(Shahrokh left our group at the end of summer 2012.)

Check details of our group members

Feb 20

February 20, 2012

The paper M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli and G. Piazza, “High Frequency AlN MEMS Resonators with Integrated Nano Hot Plate for Temperature Controlled Operation “, has been accepted for presentation at the IEEE International Frequency Control Symposium 2012 (IFCS 2012), Baltimore, USA, 21-24 May 2012.

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Oct 30

October 21, 2011

The paper M. Rinaldi, A. Tazzoli, J. Segovia-Fernandez, V. Felmetsger and G. Piazza, “High Power and Low Temperature Coefficient of Frequency Oscillator Based on a Fully Anchored and Oxide Compensated AlN Contour-Mode MEMS Resonator”, has been accepted for presentation at the IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, January 29- February 2, 2012.

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Aug 30

August 10, 2011

The paper A. Tazzoli, M. Rinaldi and G. Piazza, “Ovenized High Frequency Oscillators Based on Aluminum Nitride Contour-Mode MEMS Resonators”, has been accepted for presentation at the IEEE International Electron Devices Meeting 2011 (IEDM 2011), Washington, USA, December 5-7, 2011.

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Jul 27

Ovenized SEM

AlN MEMS Resonator with integrated Nano-Hot-Plate for temperature controlled operation

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