Category Archive: Device
Permanent link to this article: http://www.northeastern.edu/nemslab/2015/01/graphene-aluminum-nitride-nems-resonator/
Schematic illustration in layers view of a contour-extensional mode AlN NEMS resonator, where the top electrode is fabricated using a single-atomic-layer graphene sheet.
Permanent link to this article: http://www.northeastern.edu/nemslab/2015/01/graphene-electrode-for-piezoelectric-nems-resonators/
AlN Nano Plate Resonator with integrated Carbon Nanotube Forest Read the papers for details: M. Rinaldi, C. Zuniga, N. Sinha, M. Taheri, S. M. Khamis, A. T. Johnson, and G. Piazza, “Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators“, Proceedings of the IEEE International Frequency Control Symposium 2008, …
Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/cmr-swnt/
AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout Read the papers for more details: M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, “Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors”, Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, …
Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/sensor-array/