Schematic illustration in layers view of a contour-extensional mode AlN NEMS resonator, where the top electrode is fabricated using a single-atomic-layer graphene sheet.
Read the paper for details:
Z. Qian, F. Liu, Y. Hui, S. Kar and M. Rinaldi, Graphene as a Massless Electrode for Ultrahigh-Frequency Piezoelectric Nanoelectromechanical Systems, Nano Letters, 2015, in press. DOI: 10.1021/acs.nanolett.5b01208
Jan 30
Graphene electrode for piezoelectric NEMS resonators
Permanent link to this article: https://web.northeastern.edu/nemslab/2015/01/graphene-electrode-for-piezoelectric-nems-resonators/