AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout
Read the papers for more details:
M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, “Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors”, Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pg. 2666-2670. Download Here
M. Rinaldi, C. Zuniga and G. Piazza, “ss-DNA Functionalized Array of AlN Contour-Mode NEMS Resonant Sensors with Single CMOS Multiplexed Oscillator for sub-ppb Detection of Volatile Organic Chemicals“, Proceedings of the 24th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, 23-27 January 2011, pg. 976-979.