AlN MEMS Resonator with integrated Nano-Hot-Plate for temperature controlled operation
Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/ovenized-sem/
Jul 27
AlN MEMS Resonator with integrated Nano-Hot-Plate for temperature controlled operation
Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/ovenized-sem/