AlN Nano Plate Resonator with integrated Carbon Nanotube Forest
Read the papers for details:
M. Rinaldi, C. Zuniga, N. Sinha, M. Taheri, S. M. Khamis, A. T. Johnson, and G. Piazza, “Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators“, Proceedings of the IEEE International Frequency Control Symposium 2008, Honolulu, Hawaii, USA, 18-21 May 2008, pg, 443-448.