Daily Archive: July 27, 2011

Jul 27

Ovenized SEM

Ovenized SEM

AlN MEMS Resonator with integrated Nano-Hot-Plate for temperature controlled operation

Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/ovenized-sem/

Jul 27

CMR SWNT

CMR SWNT

AlN Nano Plate Resonator with integrated Carbon Nanotube Forest Read the papers for details: M. Rinaldi, C. Zuniga, N. Sinha, M. Taheri, S. M. Khamis, A. T. Johnson, and G. Piazza, “Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators“, Proceedings of the IEEE International Frequency Control Symposium 2008, …

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Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/cmr-swnt/

Jul 27

Sensor Array

AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout Read the papers for more details: M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, “Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors”, Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, …

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Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/sensor-array/

Jul 27

10GHz Resonator

10 GHz AlN Nano Plate Resonator Read the paper for details: M. Rinaldi, C. Zuniga, and G. Piazza, “5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators”, Proceedings of the 22nd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, 24-28 January 2009, pg. 916-919. Download Here

Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/10ghz-resnator/