Jul 27

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10GHz Resonator

10 GHz AlN Nano Plate Resonator
Read the paper for details:

M. Rinaldi, C. Zuniga, and G. Piazza, “5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators”, Proceedings of the 22nd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, 24-28 January 2009, pg. 916-919. Download Here

Permanent link to this article: http://www.northeastern.edu/nemslab/2011/07/10ghz-resnator/