AlN Nano Plate Resonator with integrated Carbon Nanotube Forest

Hilton Head 2012 Workshop

Prof. Rinaldi attended Hilton Head 2012 Workshop to present his paper 970 MHz Ovenized Oscillator Based on an AlN MEMS Resonator with Monolithically Integrated Suspended Nano Hot Plate.

This is a picture of him and his colleague and student at the conference. From left to right: Prof. Nick McGruer (NEU), Marco Giovannini (UPenn), Dr. Chiara Zuniga (Qualcomm MEMS Technologies), Prof. Matteo Rinaldi (NEU), Yu Hui (NEU).

Matteo receives the DARPA Young Faculty Award

July 30th 2012, Matteo receives the DARPA Young Faculty Award in Arlington, VA.

From left to right: Dr. Thomas Lee Director of the DARPA Microsystems Technology Office (MTO), Dr. Matteo Rinaldi, Dr. William Casebeer DARPA YFA Program Manager.

Go to the press release

Sensor Array

AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout

10GHz Resonator

10 GHz AlN Nano Plate Resonator

Our first group photo

This is the photo we took for ECE annual report.

From left to right: Prof. Matteo Rinaldi, Shahrokh Saeedi, Yu Hui, Raúl Vyas, Zhenyun Qian.

(Shahrokh left our group at the end of summer 2012.)

Check details of our group members

IEEE MEMS 2013 Outstanding Paper Finalist

The paper Y. Hui, T. Nan, N. X. Sun and M. Rinaldi, MEMS Resonant Magnetic Field Sensor Based on an AlN/FeGaB Bilayer Nano-Plate Resonator, was nominated Outstanding Poster Paper at the IEEE MEMS 2013 conference, Taipei, Taiwan, 20-24 January 2013. Congratulations!

Jun 23

Raul passed his thesis defense

Raul Vyas successfully defended his Master’s thesis “ALUMINUM NITRIDE MEMS RESONANT THERMAL BIOSENSORS” on June 23 2014. He will continue to pursue his PhD degree at Duke University starting from this fall.
Congratulations and good luck at Duke!

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Jun 20

Paper accepted for oral presentation in IEEE SENSORS 2014

The paper R. Vyas, Z. Qian, Y. Hui and M. Rinaldi, “High Resolution Calorimetric Sensing based on Aluminum Nitride MEMS Resonant Thermal Detectors” has been accepted for lecture presentation at IEEE SENSORS 2014, to be held in Valencia, Spain from November 2-5, 2014.


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Jun 06

Paper accepted for oral presentation in 2014 IEEE IUS

The paper G. Hummel, Y. Hui and M. Rinaldi, “Reconfigurable Mode of Vibration in AlN MEMS Resonators Using Phase Change Materials” has been accepted as oral presentation during the 2014 IEEE International Ultrasonics Symposium (IUS), Chicago, Illinois, September 3-6, 2014.


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May 02

Paper accepted for publication in JMEMS

The paper Y. Hui, T. Nan, N. X. Sun, and M. Rinaldi, “High Resolution Magnetometer based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator” has been accepted for publication in IEEE/ASME Journal of Microelectromechanical Systems (JMEMS).


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