Past Events
Distinguished Lecturer Seminar - Dr. Sang-il Park
Time: 11:00 AM - 12:00 PM
Location: The Raytheon Amphitheater, 240 Egan Center
Speaker: Dr. Sang-il Park
Organizer: Jess Viator
Contact: jviator@coe.neu.edu
Dr. Sang-il Park
Founder and CEO, Park Systems Corp,
The Nanotechnology Solutions Partner
KANC 4F, Iui-Dong 906-10, Suwon, Korea 443-270
E-mail: park@parkAFM.com
Homepage: www.parkafm.com
Abstract:
Advances in Scanning Probe Microscopy and its Applications
Scanning Probe Microscopy (SPM) and, in particular, Atomic Force Microscopy (AFM) has been widely used to measure and characterize the surface of a sample in nanometer scale. In the first generation AFM based on piezoelectric tube scanners, the scanner movements are coupled in such a way that a motion in the XY plane will directly influence the scanner’s position and sensitivity in Z, varying from different centre positions of a scan and respective scan speeds. One of the latest advancements in AFM industry has been the elimination of this cross-talk in the XY scan. Here, the XY flexure scanner, driving a sample, is decoupled from the Z scanner to which a probe is attached. The new AFM platform has a highly orthogonal and ultra flat scan. These key attributes of the new AFM are central to the accurate and reproducible measurements for quantitative nanoscale metrology. Building upon the strength of the crosstalk eliminated (XE) platform, the new AFM added a remarkable capability of non-contact AFM in ambient atmosphere by adopting the high speed Z scanner, actuated by dedicated high force piezostacks, with minimized drive mass, hence gaining much higher Z-scan bandwidth and a faster Z-servo response. The new non-contact AFM enables an ideal methodology for non-destructive sample scan with longer tip life. The design concept of the crosstalk eliminated (XE) AFM was utilized to support a couple of advanced nanotechnology applications: under-cut measurement by intentionally changing the angle of the Z scanner, enabling sidewall roughness characterization in nanoscale for the first time, and Scanning Icon Conductance Microscope (SICM) for “smart” patch-clamping as well as imaging live cells in liquid.
Biography:
Education
1977-1981: Dept. of Physics, Seoul National University (B.S.), Korea
1982-1987: Dept. of Applied Physics, Stanford University (Ph.D.), USA
1994: Stanford-AEA Executive Institute (Mini MBA), USA
Professional Awards
2009: Peter Drucker Innovation Award by the Peter Drucker Society
2010: 21st Century Grand Prize, Technology Category Award
2010: ‘2010 Korea’s Top 10 New Innovation’ Award by the Ministry of Knowledge Economy
2011: ‘Top 100 most influential Koreans in the next 10 years’ nominated by the Dong-A Ilbo
Research Field and Interests
- Nanotechnology and nanometrology
- Scanning Probe Microscopy (SPM) and its applications
Professional Positions
1997-Present: CEO and Chairman, Park Systems Corp., Korea
2004-Present: Director, Korea Nanotechnology Research Society
2007-2010: Director, The Korean Vacuum Society
2009-2010: Vice president, The Korean Physical Society
2009-Present: President, Venture Leaders Club
2010-Present: Member, National Academy Engineering of Korea
Time: 11:00 AM - 12:00 PM
Location: The Raytheon Amphitheater, 240 Egan Center
Speaker: Dr. Sang-il Park
Organizer: Jess Viator
Contact: jviator@coe.neu.edu
Dr. Sang-il Park
Founder and CEO, Park Systems Corp,
The Nanotechnology Solutions Partner
KANC 4F, Iui-Dong 906-10, Suwon, Korea 443-270
E-mail: park@parkAFM.com
Homepage: www.parkafm.com
Abstract:
Advances in Scanning Probe Microscopy and its Applications
Scanning Probe Microscopy (SPM) and, in particular, Atomic Force Microscopy (AFM) has been widely used to measure and characterize the surface of a sample in nanometer scale. In the first generation AFM based on piezoelectric tube scanners, the scanner movements are coupled in such a way that a motion in the XY plane will directly influence the scanner’s position and sensitivity in Z, varying from different centre positions of a scan and respective scan speeds. One of the latest advancements in AFM industry has been the elimination of this cross-talk in the XY scan. Here, the XY flexure scanner, driving a sample, is decoupled from the Z scanner to which a probe is attached. The new AFM platform has a highly orthogonal and ultra flat scan. These key attributes of the new AFM are central to the accurate and reproducible measurements for quantitative nanoscale metrology. Building upon the strength of the crosstalk eliminated (XE) platform, the new AFM added a remarkable capability of non-contact AFM in ambient atmosphere by adopting the high speed Z scanner, actuated by dedicated high force piezostacks, with minimized drive mass, hence gaining much higher Z-scan bandwidth and a faster Z-servo response. The new non-contact AFM enables an ideal methodology for non-destructive sample scan with longer tip life. The design concept of the crosstalk eliminated (XE) AFM was utilized to support a couple of advanced nanotechnology applications: under-cut measurement by intentionally changing the angle of the Z scanner, enabling sidewall roughness characterization in nanoscale for the first time, and Scanning Icon Conductance Microscope (SICM) for “smart” patch-clamping as well as imaging live cells in liquid.
Biography:
Education
1977-1981: Dept. of Physics, Seoul National University (B.S.), Korea
1982-1987: Dept. of Applied Physics, Stanford University (Ph.D.), USA
1994: Stanford-AEA Executive Institute (Mini MBA), USA
Professional Awards
2009: Peter Drucker Innovation Award by the Peter Drucker Society
2010: 21st Century Grand Prize, Technology Category Award
2010: ‘2010 Korea’s Top 10 New Innovation’ Award by the Ministry of Knowledge Economy
2011: ‘Top 100 most influential Koreans in the next 10 years’ nominated by the Dong-A Ilbo
Research Field and Interests
- Nanotechnology and nanometrology
- Scanning Probe Microscopy (SPM) and its applications
Professional Positions
1997-Present: CEO and Chairman, Park Systems Corp., Korea
2004-Present: Director, Korea Nanotechnology Research Society
2007-2010: Director, The Korean Vacuum Society
2009-2010: Vice president, The Korean Physical Society
2009-Present: President, Venture Leaders Club
2010-Present: Member, National Academy Engineering of Korea